Removal of arsine in PH3 by Fe-based alloy
- Received Date: 14/03/2010
- Accepted Date: 20/11/2009
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Key words:
- Fe-B amorphous alloy /
- Fe(Cu)P /
- dearsenic agent /
- phosphine /
- AsH3
Abstract: Fe-B amorphous alloy and Fe(Cu)P alloy were prepared. As dearsenic agents, their performances of removing arsine in PH3 were investigated. Results show that Fe(Cu)P alloy has the best removal performance such as lower operating temperature, higher removal capacity and lower preparation cost. The results also show that the removal performance of Fe-B amorphous alloy is better than that of Co-B amorphous alloy and zinc power.