铁基合金脱除磷化氢中的砷化氢
Removal of arsine in PH3 by Fe-based alloy
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摘要: 为了脱除磷化氢中的砷化氢,合成了Fe-B非晶态合金和Fe(Cu)P合金,实验了它们对磷化氢中砷化氢的脱除作用,并与锌粉和Co-B非晶态合金进行了比较。结果表明,Fe(Cu)P效果最佳,脱砷温度低、脱砷容量大,而且合成原料价廉易得;而Fe-B非晶态合金优于Co-B非晶态合金以及锌粉。Abstract: Fe-B amorphous alloy and Fe(Cu)P alloy were prepared. As dearsenic agents, their performances of removing arsine in PH3 were investigated. Results show that Fe(Cu)P alloy has the best removal performance such as lower operating temperature, higher removal capacity and lower preparation cost. The results also show that the removal performance of Fe-B amorphous alloy is better than that of Co-B amorphous alloy and zinc power.
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Key words:
- Fe-B amorphous alloy /
- Fe(Cu)P /
- dearsenic agent /
- phosphine /
- AsH3
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